Thin Film Polarizer 's consist of a coated plate, which is oriented at Brewster's angle with respect to the incoming beam. The thin film coating will enhance the reflectivity of the s-polarized component of the beam, while maintaining high transmission of the p-polarized component.

| Common Specification | |
| Design Wavelength | 10.6μm |
| Dimension tolerance | ± 0.10 mm |
| Thickness tolerance | ± 0.10 mm |
| Parallelism | <3 arc minutes |
| Clear Aperture | >90% |
| Surface quality | S/D 40-20 |
| Surface Flatness | lambda/2 per 1inch |